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MEMS Technology and Devices: Proceedings of the ICMAT 2007 Conference

Edited by Aiqun Liu, Edited by Jiuhui Wu, Edited by Chun Lu

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This volume covers the current trends and developments in microelectromechanical systems (MEMS) technologies and devices, particularly applications that involve MEMS design, modeling, fabrication processes, lab-on-a-chip, biophotonic, medical devices such as DNA, protein and cell sorting, and nano devices. The contributions also explore new devices, process innovation, and engineering applications related to MEMS technology and devices.

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