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Optical Inspection of Microsystems

Edited by Wolfgang Osten, Series edited by Brian J. Thompson, Contributions by Angela Duparre, Contributions by Cosme Furlong, Contributions by Ingrid De Wolf, Contributions by Anand Asundi, Contributions by Kalus Korner, Contributions by Dietmar Vogel, Contributions by Christophe Gorecki, Contributions by Alain Bosseboeuf

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normal price: R 2 063.95

Price: R 1 960.95


| book description |

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

| product details |



Normally shipped | This title will be printed on demand for your order. Delivery will be 6 weeks or less.
Publisher | Taylor & Francis Ltd
Published date | 17 Oct 2019
Language |
Format | Paperback / softback
Pages | 532
Dimensions | 254 x 178 x 0mm (L x W x H)
Weight | 453g
ISBN | 978-0-3673-9057-0
Readership Age |
BISAC | science / optics


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Normally shipped | Available from overseas. Usually dispatched in 14 days
Readership Age |
Normal Price | R 2 473.95
Price | R 2 349.95 | on special |



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